We search for industry news, so you don't need to.
Technical Paper Index  

Sequential Infiltration Synthesis: A New Lithographic Enhancement Method

U.S. national laboratory researchers have found that the many demands associated with the "resist" can be met by the use of a technique known as sequential infiltration synthesis (SIS).

Argonne National Laboratory

Complete the form below to download this Technical Paper.
After you hit submit you will be redirected to the Technical Paper page. Please be patient, it may take a few seconds for the Technical Paper to load.